Making an aluminum nitride heater
US-11862366-B2 · Jan 2, 2024 · US
This patent family groups 6 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 71945311 |
| Family type | — |
| Earliest priority | Feb 8, 2019 |
| First filing country | US |
| Member publications | 6 |
| Countries | US |
| Representative publication | US11862366B2 — Making an aluminum nitride heater |
Best representative member for this family based on priority and filing country.
US11862366B2 — Making an aluminum nitride heater (published Jan 2, 2024)
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