Semiconductor metrology based on hyperspectral imaging
US-10801953-B2 · Oct 13, 2020 · US
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Patent family 71517469
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 71517469 |
| Family type | — |
| Earliest priority | Jan 11, 2019 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10801953B2 — Semiconductor metrology based on hyperspectral imaging |
Representative publication
Best representative member for this family based on priority and filing country.
US10801953B2 — Semiconductor metrology based on hyperspectral imaging (published Oct 13, 2020)
Member publications
Related publications in this family.
Semiconductor Metrology Based On Hyperspectral Imaging
US-2020225151-A1 · Jul 16, 2020 · US