Defect inspection apparatus and defect inspection method
US-11815493-B2 · Nov 14, 2023 · US
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Patent family 71102594
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 71102594 |
| Family type | — |
| Earliest priority | Dec 20, 2018 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11815493B2 — Defect inspection apparatus and defect inspection method |
Representative publication
Best representative member for this family based on priority and filing country.
US11815493B2 — Defect inspection apparatus and defect inspection method (published Nov 14, 2023)
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Defect inspection apparatus and defect inspection method
US-2022026396-A1 · Jan 27, 2022 · US