Carbon containing hardmask removal process using sulfur containing process gas
US-11264249-B2 · Mar 1, 2022 · US
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Patent family 71072903
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 71072903 |
| Family type | — |
| Earliest priority | Dec 18, 2018 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11264249B2 — Carbon containing hardmask removal process using sulfur containing process gas |
Representative publication
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US11264249B2 — Carbon containing hardmask removal process using sulfur containing process gas (published Mar 1, 2022)
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