Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions
US-12106936-B2 · Oct 1, 2024 · US
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Patent family 71072800
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 71072800 |
| Family type | — |
| Earliest priority | Dec 17, 2018 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US12106936B2 — Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions |
Representative publication
Best representative member for this family based on priority and filing country.
US12106936B2 — Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions (published Oct 1, 2024)
Member publications
Related publications in this family.
Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions
US-2023335375-A1 · Oct 19, 2023 · US
Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions
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Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions
US-2020194226-A1 · Jun 18, 2020 · US