Onium salt, negative resist composition, and resist pattern forming process
US-11429023-B2 · Aug 30, 2022 · US
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Patent family 68280781
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 68280781 |
| Family type | — |
| Earliest priority | Oct 25, 2018 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11429023B2 — Onium salt, negative resist composition, and resist pattern forming process |
Representative publication
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US11429023B2 — Onium salt, negative resist composition, and resist pattern forming process (published Aug 30, 2022)
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