Amorphous carbon layer opening process
US-11037784-B2 · Jun 15, 2021 · US
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Patent family 67478917
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 67478917 |
| Family type | — |
| Earliest priority | Feb 5, 2018 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11037784B2 — Amorphous carbon layer opening process |
Representative publication
Best representative member for this family based on priority and filing country.
US11037784B2 — Amorphous carbon layer opening process (published Jun 15, 2021)
Member publications
Related publications in this family.
Amorphous carbon layer opening process
US-2021035796-A1 · Feb 4, 2021 · US