Thermal control for formation and processing of aluminum nitride
US-11913136-B2 · Feb 27, 2024 · US
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Patent family 66431873
This patent family groups 12 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 66431873 |
| Family type | — |
| Earliest priority | Nov 10, 2017 |
| First filing country | US |
| Member publications | 12 |
| Countries | US |
| Representative publication | US11913136B2 — Thermal control for formation and processing of aluminum nitride |
Representative publication
Best representative member for this family based on priority and filing country.
US11913136B2 — Thermal control for formation and processing of aluminum nitride (published Feb 27, 2024)
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