MEMS device with two-stage motion limit structure
US-10502759-B2 · Dec 10, 2019 · US
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Patent family 66169829
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 66169829 |
| Family type | — |
| Earliest priority | Oct 24, 2017 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10502759B2 — MEMS device with two-stage motion limit structure |
Representative publication
Best representative member for this family based on priority and filing country.
US10502759B2 — MEMS device with two-stage motion limit structure (published Dec 10, 2019)
Member publications
Related publications in this family.
Mems device with two-stage motion limit structure
US-2019120872-A1 · Apr 25, 2019 · US