Aqueous silica slurry compositions for use in shallow trench isolation and methods of using them
US-10316218-B2 · Jun 11, 2019 · US
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Patent family 65434603
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 65434603 |
| Family type | — |
| Earliest priority | Aug 30, 2017 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10316218B2 — Aqueous silica slurry compositions for use in shallow trench isolation and methods of using them |
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US10316218B2 — Aqueous silica slurry compositions for use in shallow trench isolation and methods of using them (published Jun 11, 2019)
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