Optical element for the beam guidance of imaging light in projection lithography
US-11029606-B2 · Jun 8, 2021 · US
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Patent family 62916640
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 62916640 |
| Family type | — |
| Earliest priority | Jul 26, 2017 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11029606B2 — Optical element for the beam guidance of imaging light in projection lithography |
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US11029606B2 — Optical element for the beam guidance of imaging light in projection lithography (published Jun 8, 2021)
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