Substrate processing apparatus and non-transitory computer-readable recording medium
US-12503770-B2 · Dec 23, 2025 · US
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Patent family 62241381
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 62241381 |
| Family type | — |
| Earliest priority | Nov 30, 2016 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US12503770B2 — Substrate processing apparatus and non-transitory computer-readable recording medium |
Representative publication
Best representative member for this family based on priority and filing country.
US12503770B2 — Substrate processing apparatus and non-transitory computer-readable recording medium (published Dec 23, 2025)
Member publications
Related publications in this family.
Substrate processing apparatus and non-transitory computer-readable recording medium
US-2023383411-A1 · Nov 30, 2023 · US
Substrate processing apparatus and non-transitory computer-readable recording medium
US-11761087-B2 · Sep 19, 2023 · US
Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
US-2019276938-A1 · Sep 12, 2019 · US