Selective cobalt removal for bottom up gapfill
US-10770346-B2 · Sep 8, 2020 · US
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Patent family 62106909
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 62106909 |
| Family type | — |
| Earliest priority | Nov 11, 2016 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US10770346B2 — Selective cobalt removal for bottom up gapfill |
Representative publication
Best representative member for this family based on priority and filing country.
US10770346B2 — Selective cobalt removal for bottom up gapfill (published Sep 8, 2020)
Member publications
Related publications in this family.
Selective cobalt removal for bottom up gapfill
US-2019122923-A1 · Apr 25, 2019 · US
Selective cobalt removal for bottom up gapfill
US-10163696-B2 · Dec 25, 2018 · US
Selective cobalt removal for bottom up gapfill
US-2018138085-A1 · May 17, 2018 · US