Etching apparatus
US-12230505-B2 · Feb 18, 2025 · US
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Patent family 60325137
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 60325137 |
| Family type | — |
| Earliest priority | May 19, 2016 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US12230505B2 — Etching apparatus |
Representative publication
Best representative member for this family based on priority and filing country.
US12230505B2 — Etching apparatus (published Feb 18, 2025)
Member publications
Related publications in this family.
Etching apparatus
US-2022181162-A1 · Jun 9, 2022 · US
Etching method
US-2019027372-A1 · Jan 24, 2019 · US