Method for purifying fluorine compound gas
US-10926211-B2 · Feb 23, 2021 · US
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Patent family 59628273
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 59628273 |
| Family type | — |
| Earliest priority | Feb 9, 2016 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10926211B2 — Method for purifying fluorine compound gas |
Representative publication
Best representative member for this family based on priority and filing country.
US10926211B2 — Method for purifying fluorine compound gas (published Feb 23, 2021)
Member publications
Related publications in this family.
Method for Purifying Fluorine Compound Gas
US-2019046917-A1 · Feb 14, 2019 · US