Reflective optical element for EUV lithography
US-10649340-B2 · May 12, 2020 · US
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Patent family 59363155
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 59363155 |
| Family type | — |
| Earliest priority | Jul 27, 2016 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10649340B2 — Reflective optical element for EUV lithography |
Representative publication
Best representative member for this family based on priority and filing country.
US10649340B2 — Reflective optical element for EUV lithography (published May 12, 2020)
Member publications
Related publications in this family.
Reflective optical element for euv lithography
US-2019171108-A1 · Jun 6, 2019 · US