Method for forming multi-layer film and patterning process
US-9785049-B2 · Oct 10, 2017 · US
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Patent family 59283806
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 59283806 |
| Family type | — |
| Earliest priority | Jan 12, 2016 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9785049B2 — Method for forming multi-layer film and patterning process |
Representative publication
Best representative member for this family based on priority and filing country.
US9785049B2 — Method for forming multi-layer film and patterning process (published Oct 10, 2017)
Member publications
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Method for forming multi-layer film and patterning process
US-2017199457-A1 · Jul 13, 2017 · US