Reliable deposition of thin parylene
US-11077462-B2 · Aug 3, 2021 · US
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Patent family 58558102
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 58558102 |
| Family type | — |
| Earliest priority | Oct 23, 2015 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11077462B2 — Reliable deposition of thin parylene |
Representative publication
Best representative member for this family based on priority and filing country.
US11077462B2 — Reliable deposition of thin parylene (published Aug 3, 2021)
Member publications
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Reliable deposition of thin parylene
US-2017113246-A1 · Apr 27, 2017 · US