Lithography alignment marks
US-9823574-B2 · Nov 21, 2017 · US
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Patent family 58407171
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 58407171 |
| Family type | — |
| Earliest priority | Sep 29, 2015 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9823574B2 — Lithography alignment marks |
Representative publication
Best representative member for this family based on priority and filing country.
US9823574B2 — Lithography alignment marks (published Nov 21, 2017)
Member publications
Related publications in this family.
Lithography Alignment Marks
US-2017090299-A1 · Mar 30, 2017 · US