System for inspecting a backside of a wafer
US-10215707-B2 · Feb 26, 2019 · US
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Patent family 57730989
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 57730989 |
| Family type | — |
| Earliest priority | Jul 12, 2015 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10215707B2 — System for inspecting a backside of a wafer |
Representative publication
Best representative member for this family based on priority and filing country.
US10215707B2 — System for inspecting a backside of a wafer (published Feb 26, 2019)
Member publications
Related publications in this family.
System for inspecting a backside of a wafer
US-2017010220-A1 · Jan 12, 2017 · US