Cleaning system for a polishing film
US-10814356-B2 · Oct 27, 2020 · US
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Patent family 57121457
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 57121457 |
| Family type | — |
| Earliest priority | Sep 16, 2015 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10814356B2 — Cleaning system for a polishing film |
Representative publication
Best representative member for this family based on priority and filing country.
US10814356B2 — Cleaning system for a polishing film (published Oct 27, 2020)
Member publications
Related publications in this family.
Cleaning System
US-2018257112-A1 · Sep 13, 2018 · US