Substrate cleaning apparatus, substrate cleaning method, and substrate processing apparatus
US-11285517-B2 · Mar 29, 2022 · US
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Patent family 56690208
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 56690208 |
| Family type | — |
| Earliest priority | Feb 18, 2015 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US11285517B2 — Substrate cleaning apparatus, substrate cleaning method, and substrate processing apparatus |
Representative publication
Best representative member for this family based on priority and filing country.
US11285517B2 — Substrate cleaning apparatus, substrate cleaning method, and substrate processing apparatus (published Mar 29, 2022)
Member publications
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