Polymer compound, positive resist composition, laminate, and resist patterning process
US-9944738-B2 · Apr 17, 2018 · US
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Patent family 56681918
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 56681918 |
| Family type | — |
| Earliest priority | Aug 5, 2015 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9944738B2 — Polymer compound, positive resist composition, laminate, and resist patterning process |
Representative publication
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US9944738B2 — Polymer compound, positive resist composition, laminate, and resist patterning process (published Apr 17, 2018)
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