Apparatus of inhalation type for stocking wafer at ceiling and inhaling type wafer stocking system having the same
US-9550219-B2 · Jan 24, 2017 · US
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Patent family 56163143
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 56163143 |
| Family type | — |
| Earliest priority | Dec 29, 2014 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9550219B2 — Apparatus of inhalation type for stocking wafer at ceiling and inhaling type wafer stocking system having the same |
Representative publication
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US9550219B2 — Apparatus of inhalation type for stocking wafer at ceiling and inhaling type wafer stocking system having the same (published Jan 24, 2017)
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