Apparatus for high compressive stress film deposition to improve kit life
US-10115573-B2 · Oct 30, 2018 · US
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Patent family 55655942
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 55655942 |
| Family type | — |
| Earliest priority | Oct 14, 2014 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10115573B2 — Apparatus for high compressive stress film deposition to improve kit life |
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US10115573B2 — Apparatus for high compressive stress film deposition to improve kit life (published Oct 30, 2018)
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