Focused beam scatterometry apparatus and method
US-9793178-B2 · Oct 17, 2017 · US
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Patent family 55402150
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 55402150 |
| Family type | — |
| Earliest priority | Aug 28, 2014 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9793178B2 — Focused beam scatterometry apparatus and method |
Representative publication
Best representative member for this family based on priority and filing country.
US9793178B2 — Focused beam scatterometry apparatus and method (published Oct 17, 2017)
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Focused beam scatterometry apparatus and method
US-2016061723-A1 · Mar 3, 2016 · US