Method for void-free cobalt gap fill
US-9748137-B2 · Aug 29, 2017 · US
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Patent family 55348901
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 55348901 |
| Family type | — |
| Earliest priority | Aug 21, 2014 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9748137B2 — Method for void-free cobalt gap fill |
Representative publication
Best representative member for this family based on priority and filing country.
US9748137B2 — Method for void-free cobalt gap fill (published Aug 29, 2017)
Member publications
Related publications in this family.
Method for void-free cobalt gap fill
US-2016056077-A1 · Feb 25, 2016 · US