Impurity adding apparatus, impurity adding method, and semiconductor element manufacturing method
US-10658183-B2 · May 19, 2020 · US
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Patent family 54833009
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 54833009 |
| Family type | — |
| Earliest priority | Jun 12, 2014 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10658183B2 — Impurity adding apparatus, impurity adding method, and semiconductor element manufacturing method |
Representative publication
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US10658183B2 — Impurity adding apparatus, impurity adding method, and semiconductor element manufacturing method (published May 19, 2020)
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