Method for selective etching of a block copolymer
US-10875236-B2 · Dec 29, 2020 · US
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Patent family 54366409
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 54366409 |
| Family type | — |
| Earliest priority | Sep 11, 2015 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10875236B2 — Method for selective etching of a block copolymer |
Representative publication
Best representative member for this family based on priority and filing country.
US10875236B2 — Method for selective etching of a block copolymer (published Dec 29, 2020)
Member publications
Related publications in this family.
Method for selective etching of a block copolymer
US-2019047208-A1 · Feb 14, 2019 · US