Substrate holder, plating apparatus, and plating method
US-10113246-B2 · Oct 30, 2018 · US
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Patent family 53777836
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 53777836 |
| Family type | — |
| Earliest priority | Feb 6, 2014 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10113246B2 — Substrate holder, plating apparatus, and plating method |
Representative publication
Best representative member for this family based on priority and filing country.
US10113246B2 — Substrate holder, plating apparatus, and plating method (published Oct 30, 2018)
Member publications
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Substrate holder, plating apparatus, and plating method
US-2016348264-A1 · Dec 1, 2016 · US