Overlay measurement of pitch walk in multiply patterned targets
US-9903813-B2 · Feb 27, 2018 · US
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Patent family 53543417
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 53543417 |
| Family type | — |
| Earliest priority | Jan 15, 2014 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9903813B2 — Overlay measurement of pitch walk in multiply patterned targets |
Representative publication
Best representative member for this family based on priority and filing country.
US9903813B2 — Overlay measurement of pitch walk in multiply patterned targets (published Feb 27, 2018)
Member publications
Related publications in this family.
Overlay measurement of pitch walk in multiply patterned targets
US-2015268164-A1 · Sep 24, 2015 · US