Inspection apparatus, inspection method, lithographic apparatus, patterning device and manufacturing method
US-10054862-B2 · Aug 21, 2018 · US
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Patent family 53397926
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 53397926 |
| Family type | — |
| Earliest priority | Jun 12, 2015 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US10054862B2 — Inspection apparatus, inspection method, lithographic apparatus, patterning device and manufacturing method |
Representative publication
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US10054862B2 — Inspection apparatus, inspection method, lithographic apparatus, patterning device and manufacturing method (published Aug 21, 2018)
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