Film formation apparatus and film formation method forming metal film
US-9752246-B2 · Sep 5, 2017 · US
This page is not indexed by search engines while we improve data quality.
Patent family 53057415
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 53057415 |
| Family type | — |
| Earliest priority | Nov 14, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9752246B2 — Film formation apparatus and film formation method forming metal film |
Representative publication
Best representative member for this family based on priority and filing country.
US9752246B2 — Film formation apparatus and film formation method forming metal film (published Sep 5, 2017)
Member publications
Related publications in this family.