Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
US-11087998-B2 · Aug 10, 2021 · US
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Patent family 53005262
This patent family groups 5 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 53005262 |
| Family type | — |
| Earliest priority | Nov 4, 2013 |
| First filing country | US |
| Member publications | 5 |
| Countries | US |
| Representative publication | US11087998B2 — Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods |
Representative publication
Best representative member for this family based on priority and filing country.
US11087998B2 — Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods (published Aug 10, 2021)
Member publications
Related publications in this family.
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
US-2021143034-A1 · May 13, 2021 · US
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US-10971381-B2 · Apr 6, 2021 · US
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
US-2019214284-A1 · Jul 11, 2019 · US
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
US-2016225646-A1 · Aug 4, 2016 · US