Exposure activated chemically amplified directed self-assembly (DSA) for back end of line (BEOL) pattern cutting and plugging
US-10459338-B2 · Oct 29, 2019 · US
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Patent family 52740493
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52740493 |
| Family type | — |
| Earliest priority | Sep 27, 2013 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US10459338B2 — Exposure activated chemically amplified directed self-assembly (DSA) for back end of line (BEOL) pattern cutting and plugging |
Representative publication
Best representative member for this family based on priority and filing country.
US10459338B2 — Exposure activated chemically amplified directed self-assembly (DSA) for back end of line (BEOL) pattern cutting and plugging (published Oct 29, 2019)
Member publications
Related publications in this family.
Exposure activated chemically amplified directed self-assembly (dsa) for back end of line (beol) pattern cutting and plugging
US-2017207116-A1 · Jul 20, 2017 · US
Exposure activated chemically amplified directed self-assembly (DSA) for back end of line (BEOL) pattern cutting and plugging
US-9625815-B2 · Apr 18, 2017 · US