Modified hydroxy naphthalene novolak resin, production method for modified hydroxy naphthalene novolak resin, photosensitive composition, resist material and coating
US-9765175-B2 · Sep 19, 2017 · US
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Patent family 52688794
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52688794 |
| Family type | — |
| Earliest priority | Sep 18, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9765175B2 — Modified hydroxy naphthalene novolak resin, production method for modified hydroxy naphthalene novolak resin, photosensitive composition, resist material and coating |
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US9765175B2 — Modified hydroxy naphthalene novolak resin, production method for modified hydroxy naphthalene novolak resin, photosensitive composition, resist material and coating (published Sep 19, 2017)
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