Photo-acoustic device and method for non-contact measurement of thin layers
US-10436754-B2 · Oct 8, 2019 · US
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Patent family 52597280
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52597280 |
| Family type | — |
| Earliest priority | Feb 18, 2014 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US10436754B2 — Photo-acoustic device and method for non-contact measurement of thin layers |
Representative publication
Best representative member for this family based on priority and filing country.
US10436754B2 — Photo-acoustic device and method for non-contact measurement of thin layers (published Oct 8, 2019)
Member publications
Related publications in this family.
Photo-acoustic device and method for non-contact measurement of thin layers
US-2018003679-A1 · Jan 4, 2018 · US
Photo-acoustic device and method for non-contact measurement of thin layers
US-9791419-B2 · Oct 17, 2017 · US
Photo-acoustic device and method for non-contact measurement of thin layers
US-2015233870-A1 · Aug 20, 2015 · US