MEMS Resonator
US-2026100692-A1 · Apr 9, 2026 · US
This page is not indexed by search engines while we improve data quality.
Patent family 52101815
This patent family groups 7 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52101815 |
| Family type | — |
| Earliest priority | Mar 29, 2012 |
| First filing country | US |
| Member publications | 7 |
| Countries | US |
| Representative publication | US2026100692A1 — MEMS Resonator |
Representative publication
Best representative member for this family based on priority and filing country.
US2026100692A1 — MEMS Resonator (published Apr 9, 2026)
Member publications
Related publications in this family.
Non-lid-bonded MEMS resonator with phosphorus dopant
US-12445107-B2 · Oct 14, 2025 · US
MEMS resonator with colocated temperature sensor
US-12095447-B1 · Sep 17, 2024 · US
Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant
US-2024056054-A1 · Feb 15, 2024 · US
MEMS resonator with co-located temperature sensor
US-11770112-B1 · Sep 26, 2023 · US
Dual-resonator semiconductor die
US-10476477-B1 · Nov 12, 2019 · US
Laterally-doped MEMS resonator
US-9774313-B1 · Sep 26, 2017 · US