Apparatus and method for manufacturing thin film, electro-chemical device and method for manufacturing electro-chemical device
US-9770890-B2 · Sep 26, 2017 · US
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Patent family 51985458
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51985458 |
| Family type | — |
| Earliest priority | May 30, 2013 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9770890B2 — Apparatus and method for manufacturing thin film, electro-chemical device and method for manufacturing electro-chemical device |
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US9770890B2 — Apparatus and method for manufacturing thin film, electro-chemical device and method for manufacturing electro-chemical device (published Sep 26, 2017)
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