Barrier chemical mechanical planarization composition and method thereof
US-9574110-B2 · Feb 21, 2017 · US
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Patent family 51663045
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51663045 |
| Family type | — |
| Earliest priority | Oct 11, 2013 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US9574110B2 — Barrier chemical mechanical planarization composition and method thereof |
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US9574110B2 — Barrier chemical mechanical planarization composition and method thereof (published Feb 21, 2017)
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