Microelectromechanical device having an oscillating mass and a forcing stage, and method of controlling a microelectromechanical device
US-9829319-B2 · Nov 28, 2017 · US
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Patent family 51521263
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51521263 |
| Family type | — |
| Earliest priority | Mar 13, 2013 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US9829319B2 — Microelectromechanical device having an oscillating mass and a forcing stage, and method of controlling a microelectromechanical device |
Representative publication
Best representative member for this family based on priority and filing country.
US9829319B2 — Microelectromechanical device having an oscillating mass and a forcing stage, and method of controlling a microelectromechanical device (published Nov 28, 2017)
Member publications
Related publications in this family.
Microelectromechanical device having an oscillating mass and a forcing stage, and method of controlling a microelectromechanical device
US-9448071-B2 · Sep 20, 2016 · US
Microelectromechanical device having an oscillating mass and a forcing stage, and method of controlling a microelectromechanical device
US-2016109237-A1 · Apr 21, 2016 · US