Substrate rapid thermal heating system and methods
US-9239192-B2 · Jan 19, 2016 · US
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Patent family 51351507
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51351507 |
| Family type | — |
| Earliest priority | Feb 20, 2013 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9239192B2 — Substrate rapid thermal heating system and methods |
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US9239192B2 — Substrate rapid thermal heating system and methods (published Jan 19, 2016)
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