Method for evaluating oxide semiconductor thin film, and method for quality control of oxide semiconductor thin film
US-9316589-B2 · Apr 19, 2016 · US
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Patent family 51209267
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51209267 |
| Family type | — |
| Earliest priority | Jan 15, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9316589B2 — Method for evaluating oxide semiconductor thin film, and method for quality control of oxide semiconductor thin film |
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US9316589B2 — Method for evaluating oxide semiconductor thin film, and method for quality control of oxide semiconductor thin film (published Apr 19, 2016)
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