Soft and conditionable chemical mechanical window polishing pad
US-9238295-B2 · Jan 19, 2016 · US
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Patent family 51168261
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51168261 |
| Family type | — |
| Earliest priority | May 31, 2013 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9238295B2 — Soft and conditionable chemical mechanical window polishing pad |
Representative publication
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US9238295B2 — Soft and conditionable chemical mechanical window polishing pad (published Jan 19, 2016)
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