Production of trisilylamine from monochlorosilane and ammonia by use of inert solvent
US-9617155-B2 · Apr 11, 2017 · US
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Patent family 51165289
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51165289 |
| Family type | — |
| Earliest priority | Dec 16, 2011 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9617155B2 — Production of trisilylamine from monochlorosilane and ammonia by use of inert solvent |
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US9617155B2 — Production of trisilylamine from monochlorosilane and ammonia by use of inert solvent (published Apr 11, 2017)
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