Electron beam-induced etching
US-10304658-B2 · May 28, 2019 · US
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Patent family 50846876
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 50846876 |
| Family type | — |
| Earliest priority | Jun 10, 2013 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US10304658B2 — Electron beam-induced etching |
Representative publication
Best representative member for this family based on priority and filing country.
US10304658B2 — Electron beam-induced etching (published May 28, 2019)
Member publications
Related publications in this family.
Electron beam-induced etching
US-2016020068-A1 · Jan 21, 2016 · US
Electron beam-induced etching
US-9123506-B2 · Sep 1, 2015 · US