Substrate container with purge ports
US-9997388-B2 · Jun 12, 2018 · US
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 50776525 |
| Family type | — |
| Earliest priority | Nov 20, 2012 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9997388B2 — Substrate container with purge ports |
Best representative member for this family based on priority and filing country.
US9997388B2 — Substrate container with purge ports (published Jun 12, 2018)
Related publications in this family.
US-9997388-B2 · Jun 12, 2018 · US
US-2015294889-A1 · Oct 15, 2015 · US