Method and device for detecting defects and method and device for observing defects
US-9683946-B2 · Jun 20, 2017 · US
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Patent family 50684635
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 50684635 |
| Family type | — |
| Earliest priority | Nov 8, 2012 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9683946B2 — Method and device for detecting defects and method and device for observing defects |
Representative publication
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US9683946B2 — Method and device for detecting defects and method and device for observing defects (published Jun 20, 2017)
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