Method and system for simultaneous tilt and height control of a substrate surface in an inspection system
US-9810619-B2 · Nov 7, 2017 · US
This page is not indexed by search engines while we improve data quality.
Patent family 50232999
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 50232999 |
| Family type | — |
| Earliest priority | Sep 12, 2012 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9810619B2 — Method and system for simultaneous tilt and height control of a substrate surface in an inspection system |
Representative publication
Best representative member for this family based on priority and filing country.
US9810619B2 — Method and system for simultaneous tilt and height control of a substrate surface in an inspection system (published Nov 7, 2017)
Member publications
Related publications in this family.