Radiation collector, radiation source and lithographic apparatus
US-9983482-B2 · May 29, 2018 · US
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Patent family 50179650
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 50179650 |
| Family type | — |
| Earliest priority | Mar 27, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9983482B2 — Radiation collector, radiation source and lithographic apparatus |
Representative publication
Best representative member for this family based on priority and filing country.
US9983482B2 — Radiation collector, radiation source and lithographic apparatus (published May 29, 2018)
Member publications
Related publications in this family.
Radiation Collector, Radiation Source and Lithographic Apparatus
US-2016026091-A1 · Jan 28, 2016 · US